Publikations Einzelansicht
Titel: |
Characterization of Al-O-N: A Ceramic PVD-Coating with promising High Temperature Properties |
Autor(en): |
A. von Richthofen, A. Barth, D. Neuschütz, O. Knotek, F. Löffler und W. Beele |
Journal: |
Proceedings of the International Conference on Advances In Materials And Processing Technologies |
Jahr: |
1993 |
Seite(n): |
791-799 |
High temperature transformation behaviour of metastable AlOxNy PVD-coatings with different stoichiometry and their mechanical and wet corrosion properties were investigated. The AlOxNy coatings were deposited on X 5 CrNi 18 9 and CC K10/20 substrates by reactive Magnetron Sputtering Ion Plating (MSIP). An aluminium target was sputtered at different p(N2)/p(O2) ratios by RF. Analysis of composition and chemical binding states by x-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) showed that all layers consisted of one phase only. X-ray diffraction (XRD) measurements could not detect any crystallinity of the coatings. The scratch test revealed that the best adhesion to the different substrates was obtained by oxygen rich Al-O-N coatings. The wet corrosion resistance increased with decreasing nitrogen content. The weight loss in an 80% sulfuric acid after 24 h of aging was 0,13 mg/cm2 for oxygen rich Al-O-N and Al2O3 coatings. Coatings annealed under vacuum at 600 and 900 °C for three hours remained to be x-ray amorphous. As the oxygen rich Al-O-N phase proved to have the best adhesion, wet corrosion properties and a phase stability up to over 900 °C, such coatings appear to be very promising as a protective coating against corrosion or as high temperature diffusion barrier. |
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